Turntable for semiconductor

The invention discloses a rotary table for a semiconductor, and the rotary table comprises a housing which is provided with a containing cavity, and the containing cavity is provided with an installation hole which is through in the axial direction; the stator module is arranged on the inner wall surface of the accommodating cavity; the rotor module is located on the inner side of the stator module, and the rotor module is rotatably arranged in the mounting hole through a bearing; wherein a rolling body in the bearing consists of a plurality of ceramic balls. Compared with the prior art, the ceramic bearing is adopted to install the rotor module, so that lubricating oil does not need to be added into the rotary table, chippings are prevented from being generated in the operation process of the rotary table, and meanwhile chemical substances volatilized by the lubricating oil are prevented from being attached to the semiconductor element. Load equipment is directly mounted in the hollow position in the rotary