Two-dimensional large-stroke decoupling micro-nano platform with force sense perception

A two-dimensional large-stroke decoupling micro-nano platform with force sense perception is characterized in that a guide module with a force-sensitive branch chain is arranged between an amplification mechanism and a micro-motion platform, and a strain gauge is arranged on the force-sensitive bran...

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Bibliographische Detailangaben
Hauptverfasser: YANG PENGLIN, LI LIJIAN, WANG LIJUN, WANG YINGJIA, XUE HUILING, SHANGGUAN LINJIAN, TANG SHOUQIAN, ZHOU JIAWEI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:A two-dimensional large-stroke decoupling micro-nano platform with force sense perception is characterized in that a guide module with a force-sensitive branch chain is arranged between an amplification mechanism and a micro-motion platform, and a strain gauge is arranged on the force-sensitive branch chain; the piezoelectric ceramic driver drives the displacement to be amplified by the amplification mechanism and then drives the middle part of the guide module to move perpendicular to the driving direction, so that the force-sensitive branched chains at the two ends of the guide module deform, and the strain gauges calculate the displacement and the load of the guide module through a group bridge; the system is used for calculating the mapping relation between the movement displacement of the micro-motion platform and the bridge circuit voltage output and the piezoelectric ceramic driving voltage so as to achieve accurate closed-loop control over the micro-motion platform, and meanwhile the piezoelectric cer