Temperature compensation type film bulk acoustic resonator, manufacturing method thereof and filter

The invention relates to a temperature compensation type film bulk acoustic resonator, a manufacturing method thereof and a filter, and belongs to the technical field of film bulk acoustic wave filter design. The resonator comprises a first substrate and a piezoelectric laminated structure, and the top of the first substrate is provided with a first cavity; the piezoelectric laminated structure is located on the first substrate and comprises a seed layer, a bottom electrode, an adhesion layer, a temperature compensation layer, a piezoelectric layer, a top electrode and a protective layer from bottom to top; a second cavity is formed in the peripheral edge of the temperature compensation layer; the air bridge and the air gap are manufactured at the edge of the temperature compensation layer, the air bridge and the air gap are different from the piezoelectric layer, the temperature compensation layer, the lower electrode and the adhesion layer in acoustic impedance, and the acoustic impedance of air is small, s