Multi-port phase compensation nested microwave plasma diamond film deposition device

A resonant cavity part comprises an inner cavity body, an annular waveguide, a gap opening, a quartz ring, a metal table, a deposition table, a substrate and a groove, and the gap opening is located in the wall of the inner cavity body and communicates with the inner cavity body and the annular waveguide; the metal table supports the quartz ring; the deposition table is arranged in the center of the bottom of the inner cavity and is I-shaped; the substrate is arranged above the deposition table; the groove is formed in the top of the inner cavity; the inner cavity and the quartz ring are hollow cylinders, and the annular waveguide is arranged around the inner cavity; the plurality of microwave transmission parts are connected with the resonant cavity part, feed microwaves into the inner cavity and comprise microwave sources, circulators and waveguide magic-T structures, the microwave sources generate microwave oscillation, the circulators are arranged at outlets of the microwave sources and protect the microw