Probe optical fiber for silicon optical wafer end face coupling test

The invention discloses a probe optical fiber for a silicon optical wafer end face coupling test. The probe optical fiber is provided with two tangent planes, the included angle between the first tangent plane and the optical axis is 35-40 degrees, the surface of the first tangent plane is plated wi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DING XIAOLIANG, XU SHUHAN, GAN FEI, WANG JUN, TIAN GUIXIA, BAO LINGXUAN, DOU JIADI, LI LIANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a probe optical fiber for a silicon optical wafer end face coupling test. The probe optical fiber is provided with two tangent planes, the included angle between the first tangent plane and the optical axis is 35-40 degrees, the surface of the first tangent plane is plated with a high-reflection film (HR film), the included angle between the second tangent plane and the optical axis is 10-20 degrees, the surface of the second tangent plane is plated with an anti-reflection film (AR film), and light transmitted in the optical fiber is totally reflected through the first tangent plane, is transmitted out at the angle approximately perpendicular to the second tangent plane and is coupled into a waveguide of a silicon optical chip. According to the probe optical fiber applied to the silicon optical wafer end face coupling test, the size of the tip of the optical fiber is reduced, the probe optical fiber can be suitable for narrow wafer cutting channels with the width of 15 microns and the