Micromechanical pressure sensor and manufacturing method thereof

The invention discloses a micromechanical pressure sensor and a manufacturing method thereof, and the micromechanical pressure sensor comprises a rigid substrate which is provided with a concave cavity; the pressure sensitive film is arranged at the opening of the concave cavity so as to form a sealed cavity with the rigid substrate, and the pressure sensitive film deforms in response to the pressure difference inside and outside the sealed cavity; the magnetic element is arranged in the sealing cavity and is positioned at one end, facing the rigid substrate, of the pressure sensitive film; and the electromagnetic element is arranged in the sealing cavity, is positioned at one end, facing the magnetic element, of the sealing cavity, and is used for generating a magnetic field by electrifying so as to attract or repel the magnetic element to enable the deformation of the pressure sensitive film to be zero. According to the invention, pressure detection can be realized, and deformation of the pressure sensitive