Self-calibration method for micro-assembly equipment

The invention belongs to the technical field of automatic assembly of precise tiny parts, and relates to a self-calibration method for micro-assembly equipment. Based on a machine vision system in the micro-assembly equipment, a calibration plate with simple features is matched, planned motion is completed by controlling a corresponding linear guide rail, coordinate changes of feature points on the calibration plate in the view of a camera before and after the motion are observed, motion information and coordinate information are substituted into a solving model for calculation, and the motion information and the coordinate information are calculated. And sequentially completing the calibration task of each calibration parameter. According to the method, calibration work of multiple parameters can be completed at a time, an external precision measuring tool is not needed, cost is low, operation is easy, precision is high, efficiency is high, the calibrated parameters can be used for compensation in follow-up