Sputtering target material and preparation method thereof

The invention discloses a sputtering target material and a preparation method thereof. The sputtering target material comprises a target material body and a welding shell wrapping the bottom and the outer side of the target material body. The welding shell is tightly combined with the target materia...

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Bibliographische Detailangaben
Hauptverfasser:	YAMADA HIROSHI, OIWA KAZUHIKO, YAO KEKE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY CLADDING OR PLATING BY SOLDERING OR WELDING COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMBINED OPERATIONS CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR METALLURGY OTHER WORKING OF METAL PERFORMING OPERATIONS SOLDERING OR UNSOLDERING SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING UNIVERSAL MACHINE TOOLS WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	The invention discloses a sputtering target material and a preparation method thereof. The sputtering target material comprises a target material body and a welding shell wrapping the bottom and the outer side of the target material body. The welding shell is tightly combined with the target material body through friction stir welding or electron beam welding. The preparation method of the sputtering target material comprises the following steps: step 1, attaching a metal plate to the bottom of a target material body, and embedding a metal ring in the circumferential direction of the target material body, so that the target material body is embedded into a groove space formed by the metal plate and the metal ring; and 2, the metal ring, the target material body and the edge of the metal plate are welded, the metal plate and the bottom area of the target material body are welded, and then a welding shell wrapping the outer side and the bottom of the target material body is formed. The prepared sputtering targe