Low-temperature preparation method of all-solid-state thin film lithium battery

The invention discloses a low-temperature preparation method of an all-solid-state thin-film lithium battery, which is characterized in that a thin-film electrode is prepared at a low temperature by spin-coating a nano material, and low-temperature preparation of the all-solid-state lithium battery is realized by taking low-temperature sputtering LiPON as a solid electrolyte. The method comprises the following steps: preparing a thin film electrode with controllable thickness, smooth surface and good uniformity from nanocrystal electrode powder by utilizing spin coating, and preparing the all-solid-state thin film lithium battery at low temperature by sputtering or further spin coating. The method has the advantages that high-temperature annealing crystallization can be avoided, operation is easy and convenient, implementation is easy, low-temperature preparation is achieved, and an all-solid-state thin-film lithium ion battery can be developed through an existing electrode material system. 本发明公开了一种全固态薄膜锂电池的低