Semiconductor device

A semiconductor device is disclosed. The semiconductor device includes: a semiconductor substrate including a first region and a second region; a first interlayer insulating layer on the second region; a cap layer disposed on the first interlayer insulating layer, the upper surface of the cap layer...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LEE WONUL, CHOI IN-HYUK, YANG JUN-HYUNG
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:A semiconductor device is disclosed. The semiconductor device includes: a semiconductor substrate including a first region and a second region; a first interlayer insulating layer on the second region; a cap layer disposed on the first interlayer insulating layer, the upper surface of the cap layer including a first trench; conductive patterns spaced apart on the cap layer, side surfaces of the conductive patterns being aligned with inner side surfaces of the first trenches; and a peripheral separation pattern disposed in the first trench to cover a side surface of the conductive pattern. The peripheral separation pattern has a first thickness on a side surface of the conductive pattern, and has a second thickness greater than or equal to the first thickness on a lower surface of the first trench. 公开了一种半导体装置。所述半导体装置包括:半导体基底,包括第一区域和第二区域;第一层间绝缘层,位于第二区域上;盖层,设置在第一层间绝缘层上,盖层的上表面包括第一沟槽;导电图案,在盖层上间隔开,导电图案的侧表面与第一沟槽的内侧表面对齐;以及外围分离图案,设置在第一沟槽中以覆盖导电图案的侧表面。外围分离图案在导电图案的侧表面上具有第一厚度,并且在第一沟槽的下表面上具有大于或等于第一厚度的第二厚度。