Matching debugging method for cylindrical imaging compression system in Fizeau interference type wavemeter

The invention belongs to the technical field of optical metrology testing, and discloses an optimal matching debugging method for a cylindrical compression imaging system, which comprises the following steps of: firstly, matching a cylindrical mirror with a linear array CCD (Charge Coupled Device),...

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Bibliographische Detailangaben
Hauptverfasser: LIU RUIXING, ZHANG DENG, TENG GUOQI, SUN YUNAN, KANG ZHEN, MA SHIBANG, XIE QI, LI HONGGUANG, YUAN LINGUANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention belongs to the technical field of optical metrology testing, and discloses an optimal matching debugging method for a cylindrical compression imaging system, which comprises the following steps of: firstly, matching a cylindrical mirror with a linear array CCD (Charge Coupled Device), and when the output waveform is close to a straight line and the amplitude of a signal is maximum, completing the matching of the cylindrical mirror and the linear array CCD by observing the waveform output from the linear array CCD to an oscilloscope; then the cylindrical mirror and the linear array CCD are used as a whole to be matched with the interference module, the waveform output to the oscilloscope by the linear array CCD is observed, and when the duty ratio of the output waveform is close to 1: 1 and the signal peak-valley value is maximum, the interference module and the cylindrical mirror linear array CCD are integrally matched. According to the invention, the adjustment problem of the cylindrical surfac