Wafer cassette transfer assembly

A wafer cassette transfer assembly includes a wafer cassette port for receiving a wafer cassette, a transfer shaft coupled to the wafer cassette port, a shaft receiver, a shaft coupled to the transfer shaft and to the shaft receiver, a latch passing through the shaft receiver and through the shaft,...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIN SHENGYUAN, ZHOU YINTONG, JI YUANXING, LIU YUQI, WANG HONGZHI, ZHOU ZHIWEI
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:A wafer cassette transfer assembly includes a wafer cassette port for receiving a wafer cassette, a transfer shaft coupled to the wafer cassette port, a shaft receiver, a shaft coupled to the transfer shaft and to the shaft receiver, a latch passing through the shaft receiver and through the shaft, and a latch buckle including a first ring and a second ring, wherein the bolt comprises a first end and a second end opposite to the first end. A latch buckle is coupled to the latch, a first ring surrounding a first end of the latch, and a second ring surrounding a second end of the latch. 一种晶片盒转移组合件包含用于接收晶片盒的晶片盒端口、耦合到晶片盒端口的转移轴、轴杆接收器、耦合到转移轴且耦合到轴杆接收器的轴杆、穿过轴杆接收器且穿过轴杆的插销以及包含第一环和第二环的插销扣,其中插销包括第一端和与第一端相对的第二端。插销扣耦合到插销,第一环环绕插销的第一端,并且第二环环绕插销的第二端。