Device and method for machining micro-channel by combining paraxial jet water-assisted laser and micro-milling

The invention relates to a device and method for machining a micro-channel in a paraxial jet water-assisted laser and micro-milling combined mode, and relates to the technical field of micro-machining equipment.The device comprises a base installed on a micro-machining machine tool, a machine tool X...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LEI WEINING, MA RUI, HE BIN, DING KAI, WANG DENGLONG, LI QILIN, HAN JINJIN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to a device and method for machining a micro-channel in a paraxial jet water-assisted laser and micro-milling combined mode, and relates to the technical field of micro-machining equipment.The device comprises a base installed on a micro-machining machine tool, a machine tool X-Y movable platform installed on the base and a micro dynamometer located on the machine tool X-Y movable platform; a workpiece is mounted above the micro dynamometer; the workpiece is subjected to water-assisted laser processing through a laser device and a paraxial jet device; the large-length-diameter-ratio micro-diameter milling cutter is used for carrying out micro-milling machining on a workpiece, the multi-degree-of-freedom CCD electron microscope I is detachably connected with the laser, and the multi-degree-of-freedom CCD electron microscope II is detachably connected with the air flotation high-speed motorized spindle; the liquid storage tank is installed on the micro dynamometer, the workpiece is located