Semiconductor device
A semiconductor device includes a substrate including a first region and a second region; data storage patterns on the first region and spaced apart from each other in the first direction; an upper insulating layer on the first and second regions and on the data storage pattern; a unit line structur...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | A semiconductor device includes a substrate including a first region and a second region; data storage patterns on the first region and spaced apart from each other in the first direction; an upper insulating layer on the first and second regions and on the data storage pattern; a unit line structure penetrating the upper insulating layer on the first region, extending in the first direction, and electrically connected to the data storage pattern; and an upper connection structure penetrating the upper insulating layer on the second region. The upper connection structure includes an upper conductive line and an upper conductive contact disposed along a bottom surface of the upper conductive line. A bottom surface of the upper conductive line is located at a height higher than a bottom surface of the unit line structure. The side surface of the unit line structure has a continuously extending linear shape.
一种半导体器件包括:衬底,包括第一区域和第二区域;数据存储图案,在第一区域上并且在第一方向上彼此间隔开;上绝缘层,在第一区域和第二区域上以及数据存储图案上;单元线结构,穿透第一区域上的上绝缘层,在第一方向上延伸 |
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