Wafer loading and unloading hanger equipment

The invention provides wafer loading and unloading hanger equipment, which comprises a main bracket, a rear cover unloading unit, a hanger clamping unit, a wafer ejection unit, a sealing ring purging mechanism and a visual inspection mechanism, and is characterized in that the sealing ring purging mechanism is used for generating purging airflow for a sealing ring on a hanger after a wafer on the hanger is ejected; and the visual inspection mechanism is used for collecting an image of the sealing ring on the hanger and judging whether foreign matters are left on the sealing ring or not after the wafer on the hanger is ejected out. By the adoption of the technical scheme, after electroplating of a previous wafer is completed and before installation of a next wafer, foreign matter on the sealing ring of the hanging tool can be cleaned in time, it is ensured that the wafers and the sealing ring keep good sealing performance, wafer fragments and electroplating liquid leakage are prevented, the uniformity of a waf