Preparation method of optical fiber type stepped laser flyer transduction element based on MEMS (Micro Electro Mechanical System) process

The invention discloses a preparation method of an optical fiber type stepped laser flyer transduction element based on an MEMS (Micro Electro Mechanical System) process, which comprises the following steps: firstly, pretreating the end surface of an optical fiber, including polishing, cleaning and...

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Bibliographische Detailangaben
Hauptverfasser: ZHI TIANJIN, XIE TIANYU, WU LIZHI, YUAN HAOFANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a preparation method of an optical fiber type stepped laser flyer transduction element based on an MEMS (Micro Electro Mechanical System) process, which comprises the following steps: firstly, pretreating the end surface of an optical fiber, including polishing, cleaning and drying; putting the optical fiber into a designed mold, and sequentially carrying out primary photoetching (gluing, exposure and development), magnetron sputtering and photoresist removal on the end surface of the optical fiber to prepare an ablation layer and a heat insulation layer; and then sequentially carrying out secondary photoetching, magnetron sputtering and photoresist removal on the film subjected to primary photoetching to prepare a flyer layer, thereby obtaining the optical fiber type step laser flyer transduction element. The step-type laser flyer transduction element prepared by the MEMS process has the advantages that the flyer film is directly plated on the end face of the optical fiber, the repeat