High-precision piezoelectric ink-jet printer nozzle and preparation method thereof

The invention relates to a high-precision piezoelectric ink-jet printer nozzle and a preparation method thereof, the high-precision piezoelectric ink-jet printer nozzle comprises a first silicon substrate and a second silicon substrate which are bonded with each other, and a liquid spraying passage...

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Bibliographische Detailangaben
Hauptverfasser: WANG XUCONG, LUAN CHUN, ZHOU WEI, LIU CHAORAN, LIU MINGHUI, WANG GAOFENG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to a high-precision piezoelectric ink-jet printer nozzle and a preparation method thereof, the high-precision piezoelectric ink-jet printer nozzle comprises a first silicon substrate and a second silicon substrate which are bonded with each other, and a liquid spraying passage is formed between the first silicon substrate and the second silicon substrate; the liquid spraying channel comprises a liquid inlet channel, a liquid inlet storage tank, a flow limiting channel, a liquid spraying storage tank and a nozzle which are sequentially distributed in the liquid inlet flow direction; the piezoelectric ink-jet driving piece is arranged corresponding to the liquid spraying and storing pool, and the attaching face of the piezoelectric ink-jet driving piece and the liquid spraying and storing pool is a vibration face; the first silicon substrate and the second silicon substrate are respectively provided with a first cutting head and a driving part thereof as well as a second cutting head and a