Round corner processing method of ITO target material
The invention discloses a fillet processing method for an ITO target material, and aims to reduce the operation difficulty when the target material is clamped. According to the technical scheme, the method relates to a grinding machine, an electromagnetic chuck and a clamping assembly, and the elect...
Gespeichert in:
Hauptverfasser: | , , , , , |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The invention discloses a fillet processing method for an ITO target material, and aims to reduce the operation difficulty when the target material is clamped. According to the technical scheme, the method relates to a grinding machine, an electromagnetic chuck and a clamping assembly, and the electromagnetic chuck is arranged on the grinding machine; the clamping assembly comprises two clamping blocks, the two clamping blocks are oppositely arranged, and a clamping space is formed between the two clamping blocks; the clamping block can be tightly sucked by the electromagnetic chuck; each of the two clamping blocks is connected with an elastic device; comprising the following steps that a target material is inserted into a clamping space, the clamping space is expanded, and an elastic device drives a clamping block to reset and clamp the target material; an electromagnetic chuck is started, and the electromagnetic chuck tightly sucks the two clamping blocks; a grinding wheel of the grinding machine polishes t |
---|