Round corner processing method of ITO target material

The invention discloses a fillet processing method for an ITO target material, and aims to reduce the operation difficulty when the target material is clamped. According to the technical scheme, the method relates to a grinding machine, an electromagnetic chuck and a clamping assembly, and the elect...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LEE YOON-GYU, KANG SU-NAM, WANG ZITONG, PEI WEIYANG, YU FANG, LIU YIHUA
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a fillet processing method for an ITO target material, and aims to reduce the operation difficulty when the target material is clamped. According to the technical scheme, the method relates to a grinding machine, an electromagnetic chuck and a clamping assembly, and the electromagnetic chuck is arranged on the grinding machine; the clamping assembly comprises two clamping blocks, the two clamping blocks are oppositely arranged, and a clamping space is formed between the two clamping blocks; the clamping block can be tightly sucked by the electromagnetic chuck; each of the two clamping blocks is connected with an elastic device; comprising the following steps that a target material is inserted into a clamping space, the clamping space is expanded, and an elastic device drives a clamping block to reset and clamp the target material; an electromagnetic chuck is started, and the electromagnetic chuck tightly sucks the two clamping blocks; a grinding wheel of the grinding machine polishes t