Dual-channel atmospheric pressure microwave plasma jet device
The invention discloses a dual-channel atmospheric pressure microwave plasma jet device, and belongs to the field of atmospheric pressure microwave plasma jet application. The device comprises a dual-channel coaxial resonator, a pulse modulation microwave power supply and a gas path input. The dual-...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a dual-channel atmospheric pressure microwave plasma jet device, and belongs to the field of atmospheric pressure microwave plasma jet application. The device comprises a dual-channel coaxial resonator, a pulse modulation microwave power supply and a gas path input. The dual-channel coaxial resonator is composed of a gas pipeline, a large coaxial cavity, a small coaxial cavity, an SMA interface, a cavity threaded interface and a hollow coaxial line. Microwave energy of the pulse modulation microwave power supply is generated by the microwave signal generator and is transmitted to the microwave power output interface through the power amplifier and the directional coupler. The gas path input comprises a gas storage bottle, a pressure reducing valve, a needle valve and a gas flow meter, and the needle valve and the gas flow meter can control the input flow of working gas. Working gas can be separated, space-time distribution adjustment of active particles in the plasma jet can be achieve |
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