Method and device for adjusting semiconductor heterogeneous interface components

The invention discloses a semiconductor heterogeneous interface component adjusting method and device, and the method comprises the steps: carrying out the preprocessing of a plurality of groups of superlattice growth test results, and generating a plurality of relation data between superlattice int...

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Bibliographische Detailangaben
Hauptverfasser: WANG JUN, TAN SHAOYANG, CHENG YANG, FANG YANHAN, ZHAO WU, GUO YINTAO, XIA MINGYUE
Format: Patent
Sprache:chi ; eng
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