Blue-light high-reflective film insensitive to small-size nodule defects and design method of blue-light high-reflective film

The invention discloses a blue light high-reflective film insensitive to small-size nodule defects and a design method, which can reduce electric field enhancement caused by the small-size nodule defects and are mainly used for designing the blue light high-reflective film in a laser system. Compris...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHAI YUE, ZHANG HONG, WANG LE, FU YANA, CHEN WANGLEI, ZHANG XIN, ZHU QIANGQIANG, LI YANGHUI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a blue light high-reflective film insensitive to small-size nodule defects and a design method, which can reduce electric field enhancement caused by the small-size nodule defects and are mainly used for designing the blue light high-reflective film in a laser system. Comprising the following steps: setting an initial film system structure Sub (HL) nHAir; setting a continuous optimization target, and optimizing to obtain the film layer thickness of the three layers of films on the outer side; adding two layers of high and low refractive index film layers, fixing the thickness of the outer film layer, setting a continuous optimization target, and optimizing the thickness of the newly added two layers of high and low refractive index film layers on the inner side; repeating until the reflectivity of the whole film layer is greater than 95% to obtain a cycle number n1; n is equal to n1 + n0, the inner side film layer close to the substrate is a high-refractive-index film layer and a low-r