Method for detecting flatness of polishing film of double-sided polishing machine

The invention relates to a method for detecting the planeness of a polishing film of a double-sided polishing machine, which comprises the following steps of: measuring the planeness of the polishing film by using a tool consisting of two dial indicators and a hard gasket, and enabling a connecting...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	YU QINTAO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
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