Method and device for keeping vacuum degree of coating cavity stable and readable storage medium
The invention discloses a method for keeping the vacuum degree of a coating chamber stable, which is applied to a vacuum coating production line, and comprises the following steps: in the process that a base material positioned on the front side of the coating chamber moves towards the coating chamb...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a method for keeping the vacuum degree of a coating chamber stable, which is applied to a vacuum coating production line, and comprises the following steps: in the process that a base material positioned on the front side of the coating chamber moves towards the coating chamber, before a first vacuum gate valve is opened, a second vacuum gate valve is opened; filling a process gas of which the type is the same as that of the coating chamber into the front transition chamber, and controlling the vacuum degree of the front transition chamber, so that when the base material reaches the rear end of the front transition chamber or before the base material reaches the rear end of the front transition chamber, the vacuum degree of the front transition chamber is controlled; the vacuum degree of the front transition chamber is within a preset deviation range relative to the vacuum degree of the coating chamber; similarly, before the second vacuum gate valve is opened, the process is referred t |
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