Loader gripper and wafer transfer device
The invention relates to the technical field of semiconductor special equipment manufacturing, in particular to a loader gripper and a wafer transfer device. The loader gripper comprises a clamping mechanism and a lifting mechanism. The clamping mechanism comprises a clamping driving assembly and a...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to the technical field of semiconductor special equipment manufacturing, in particular to a loader gripper and a wafer transfer device. The loader gripper comprises a clamping mechanism and a lifting mechanism. The clamping mechanism comprises a clamping driving assembly and a clamping assembly, a clamping space is formed in the clamping assembly, the clamping driving assembly is connected with the clamping assembly, and the clamping driving assembly can drive the clamping assembly to loosen or clamp the fixed bearing assembly in the clamping space; the lifting mechanism comprises a lifting driving assembly and a lifting assembly, and the lifting driving assembly can drive the lifting assembly to ascend and descend relative to the clamping assembly so that the movable bearing assembly can be lifted or released relative to the fixed bearing assembly. The wafer transfer device comprises the loader gripper. According to the loader gripper and the wafer transfer device, the loader can be aut |
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