Wafer-level optical composite filter impressing process

The invention discloses a wafer-level optical composite filter impressing process. According to the wafer-level optical composite filter imprint process, the process of coating the upper surface and the lower surface of the glass substrate, cutting the glass substrate into single bodies and carrying...

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Bibliographische Detailangaben
Hauptverfasser: YU QICHUAN, WANG JI, ZHANG YONGQING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a wafer-level optical composite filter impressing process. According to the wafer-level optical composite filter imprint process, the process of coating the upper surface and the lower surface of the glass substrate, cutting the glass substrate into single bodies and carrying out glue injection molding through the glue injection mold is adopted, the process steps are simple, the process cost is low, the manufactured composite filter is small in overall thickness and fine and small in size, more installation space is provided for assembly of downstream devices, and the production efficiency is improved. And the product reliability is improved. 本发明公开了一种晶圆级光学复合滤波片压印工艺。本发明晶圆级光学复合滤波片压印工艺采用玻璃基板上下表面镀膜并切割成单体结合注胶模具注胶成型的工艺,工艺步骤简易,工艺成本低,且制作完成的复合滤波片的整体厚度较薄,尺寸精小,对下游器件的组装提供了更多安装空间,提高产品的可靠性。