Wafer clamping pre-alignment mechanism
A wafer clamping pre-alignment mechanism disclosed by the present invention comprises a machine base, a rotating module and a pre-alignment module, the rotating module comprises a fixed frame, a connecting plate and a wafer adsorption mechanism, the pre-alignment module comprises a clamping seat ins...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | A wafer clamping pre-alignment mechanism disclosed by the present invention comprises a machine base, a rotating module and a pre-alignment module, the rotating module comprises a fixed frame, a connecting plate and a wafer adsorption mechanism, the pre-alignment module comprises a clamping seat installation frame and a clamping seat which are symmetrically distributed, and a fixed base is fixedly installed on the machine base. Two sets of positioning sliding blocks and guide rail air cylinders are arranged on the fixed base, the positioning sliding blocks are used for being fixed to the extending part of the lower end of the clamping base installation frame through bolts, one end of a connecting plate is fixed to the lower end face of the wafer adsorption mechanism, and the other end of the connecting plate is fixed to the side edge of the fixed frame. A clamping base is fixed to the upper end of the clamping base installation frame through bolts, an arc-shaped step groove for storing wafers is formed in the |
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