Rotary cleaning tank mechanism for silicon wafer cleaning and silicon wafer rotating method

The rotary cleaning tank mechanism comprises a liquid storage tank and a plurality of flower baskets arranged in the liquid storage tank, the liquid storage tank comprises an inner tank body and an outer tank body, the flower baskets are arranged in the inner tank body through supporting seats on the inner wall of the inner tank body, and first cavities for containing the silicon wafers are formed in the flower baskets; a driving assembly for rotating the silicon wafer in the first chamber is arranged in the liquid storage tank; shaft sleeves are sleeved outside the rotating shaft, coaxiality or eccentricity between the shaft sleeves and the rotating shaft is achieved between the shaft sleeves and the rotating shaft through moving sets, silicon wafers in the basket rotate in the basket along with rotation of the shaft sleeves and the rotating shaft, when the shaft sleeves and the rotating shaft are coaxial, the driving assembly drives the two shaft sleeves to rotate circumferentially in the same direction, an