Illumination system, inspection tool having illumination system, and method of operating illumination system

The embodiment of the invention relates to a lighting system, an inspection tool with the lighting system and a method for operating the lighting system. A configurable area light source is arranged in an illumination optical axis of an illumination beam path, wherein the configurable area light source is configured such that different beam diameters can be set. At least one illumination lens is positioned in the illumination beam path to direct a collimated beam at least onto a field of view on a surface of the object, wherein a value of an angle of incidence of the illumination optical axis of the illumination beam path is equal to a value of a reflection angle of an imaging optical axis of an imaging beam path. The invention allows the functionality of combining wide-angle coaxial lighting and collimated coaxial lighting in a lighting system. 本申请实施例涉及照明系统、具有照明系统的检验工具及操作照明系统的方法。可配置区域光源布置于照明光束路径的照明光轴中，其中所述可配置区域光源经配置使得可设定不同光束直径。至少一个照明透镜定位于所述照明光束路径中以将准直光束至少引导到所述对象的表面上的视野上，其中所述照明光束路径的所述照明光轴的入射角的值等于成像光束路径的成像光轴的反