Quick-cooling single crystal furnace chassis and use method thereof

The invention relates to the field of single crystal furnace components, and particularly discloses a single crystal furnace chassis capable of rapidly cooling and a cooling method thereof. A first cooling channel which is spirally arranged from the outer ring of a chassis main body to the center di...

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1. Verfasser: NI JIANGANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to the field of single crystal furnace components, and particularly discloses a single crystal furnace chassis capable of rapidly cooling and a cooling method thereof. A first cooling channel which is spirally arranged from the outer ring of a chassis main body to the center direction is formed in a water shield plate; a water inlet communicated with the first cooling channel is formed in the periphery of the water cover plate, a second cooling channel extending downwards spirally is formed in the outer side wall of the crucible flange, a middle opening communicated with the first cooling channel and the second cooling channel is formed in the upper outer side wall of the crucible flange, and a water outlet communicated with the second cooling channel is formed in the lower outer side wall of the crucible flange; a water diversion piece is distributed on the first cooling channel in the spiral direction of the first cooling channel, and comprises a column body connecting the base plate b