METHOD AND APPARATUS FOR MEASURING EDGE RING TEMPERATURE

An apparatus for measuring a temperature of a component inside a processing chamber. The apparatus may include a light tube positioned between a lamp radiation filter window and the assembly, the light tube having a first end with a ramp configured to redirect infrared radiation emitted from the assembly through the light tube and having a second end remote from the first end; an optical assembly configured to collimate, filter and focus the infrared radiation from the second end portion of the light tube; an optical detector configured to receive an output from the optical assembly and generate at least one signal representative of the infrared radiation; a temperature circuit converting the at least one signal into a temperature value; and a controller configured to receive the temperature value and make adjustments to other processing parameters of the processing chamber based on the temperature value. 一种用于测量在处理腔室内部的组件的温度的设备。该设备可包括：光管，定位在灯辐射滤光窗与该组件之间，该光管具有带有斜面的第一端部并具有远离该第一端部的第二端部，该斜面被构造成将从该组件所发射的红外辐射重新导向穿过