Linear motion mechanism and particle scattering suppression method

The present invention provides a linear motion mechanism comprising: an internal moving body which is provided in a housing, the inside of which can be vented, moves linearly, and moves an external moving body outside the housing, the external moving body being connected to a connection part extendi...

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Bibliographische Detailangaben
Hauptverfasser: IIDA NARUAKI, SASAKI KEISUKE, AKIMOTO MASAMI, IDE YASUMORI, MATSUSHITA KAZUYA, YASUTAKE TAKAHIRO, NAKASHIMA TSUNENAGA, OZEKI MASATO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The present invention provides a linear motion mechanism comprising: an internal moving body which is provided in a housing, the inside of which can be vented, moves linearly, and moves an external moving body outside the housing, the external moving body being connected to a connection part extending from an opening to the outside of the housing; a sealing tape that extends in the linear direction, is provided in the housing so as to close the opening, and faces an opening edge of the opening at a distance from one surface side of both ends in the width direction; and a deformation suppression part that is provided so as to face a portion on the other surface side of both end portions in the width direction of the sealing tape in order to suppress deformation of the sealing tape that is connected to the internal moving body so as to move in accordance with the movement of the internal moving body. 本发明提供一种直线运动机构,其包括:内部移动体,设置在内部可被排气的壳体内,进行直线移动并且使与从上述开口部向该壳体的外部伸出的连接部连接的壳体外部的外部移动体移动;密封带,其在上述直线方向上延伸,以封闭上述开口部的方式设置