PROBE SHEET AND PROBE SHEET MANUFACTURING METHOD

The invention provides a probe sheet and a method for manufacturing the probe sheet, wherein the probe sheet can obtain excellent anisotropy and durability even for terminals with fine pitches. The probe sheet is provided with: a flexible sheet (10) having a plurality of through electrodes (12); a first anisotropic conductive elastomer layer (20) that is disposed on one surface of the flexible sheet (10) and that is formed by linking conductive particles (22) in the thickness direction from the through electrode (12) to the surface; and a second anisotropic conductive elastomer layer (30) that is disposed on the other surface of the flexible sheet (10), and that is formed by linking the conductive particles (32) in the thickness direction from the through electrode (12) to the surface. 本发明提供即使对细间距的端子也能得到优异的各向异性和耐久性的探针片以及探针片的制造方法。所述探针片具备：柔性片(10)，具有多个贯通电极(12)；第一各向异性导电性弹性体层(20)，配置于柔性片(10)的一个面，从贯通电极(12)至表面为止使导电性粒子(22)在厚度方向连锁而形成；以及第二各向异性导电性弹性体层(30)，配置于柔性片(10)的另一个面，从贯通电极(12)至表面为止使导电性粒子(32)在厚度方向连锁而形成。