Valve heat insulation device of epitaxial furnace and epitaxial furnace

The invention belongs to the technical field of epitaxial growth, and particularly relates to a valve heat insulation device of an epitaxial furnace and the epitaxial furnace, the valve heat insulation device of the epitaxial furnace comprises a flange used for connecting a reaction chamber of the e...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG HUIYONG, SHENG FEILONG, XU JUN, LIU XINRAN, WU SANZHONG
Format: Patent
Sprache:chi ; eng
Schlagworte:
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