Valve heat insulation device of epitaxial furnace and epitaxial furnace

The invention belongs to the technical field of epitaxial growth, and particularly relates to a valve heat insulation device of an epitaxial furnace and the epitaxial furnace, the valve heat insulation device of the epitaxial furnace comprises a flange used for connecting a reaction chamber of the e...

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Bibliographische Detailangaben
Hauptverfasser:	WANG HUIYONG, SHENG FEILONG, XU JUN, LIU XINRAN, WU SANZHONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR CHEMISTRY CRYSTAL GROWTH METALLURGY PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	The invention belongs to the technical field of epitaxial growth, and particularly relates to a valve heat insulation device of an epitaxial furnace and the epitaxial furnace, the valve heat insulation device of the epitaxial furnace comprises a flange used for connecting a reaction chamber of the epitaxial furnace and a transmission valve of the epitaxial furnace, and the flange is provided with a transmission port used for substrate feeding and discharging; the heat insulation baffle is movably mounted on one side, close to the reaction chamber, of the flange; the driving mechanism is mounted on the flange, is connected with the heat insulation baffle and is used for driving the heat insulation baffle to move according to the operation state of the reaction chamber so as to shield or open the transmission port; the device can utilize the driving mechanism to drive the heat insulation baffle to move according to the operation state of the reaction chamber so as to shield or open the transmission port on the