Visual algorithm based on online graphite boat silicon wafer detection
The invention relates to a visual algorithm based on online graphite boat silicon wafer detection, and belongs to the field of graphite boat silicon wafer detection, a graphite boat is placed on an automatic device of a wafer loading and unloading machine, the graphite boat is controlled to enter an...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to a visual algorithm based on online graphite boat silicon wafer detection, and belongs to the field of graphite boat silicon wafer detection, a graphite boat is placed on an automatic device of a wafer loading and unloading machine, the graphite boat is controlled to enter and exit a channel through a PLC, and a visual detection device is arranged on the inclined upper portion of a graphite boat operation channel. The method comprises a camera module, a light source and a corresponding industrial personal computer, graphite boat silicon wafers are tightly attached to the two sides of a boat page, the silicon wafers are prone to warping and falling in the graphite boat operation process and the mechanical arm grabbing process, the production efficiency is affected, and therefore the graphite boat silicon wafer detection algorithm is designed to achieve silicon wafer warping and falling detection. According to the invention, online detection of the graphite boat silicon wafer in the sola |
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