Piezoelectric type electrostatic chuck

The piezoelectric type electrostatic chuck comprises electrodes, a ceramic plate and an aluminum substrate, the ceramic plate is arranged on the aluminum substrate, the electrodes are arranged on the ceramic plate and the aluminum substrate, and a piezoelectric module is jointly arranged between the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHU LI, TAO WENCHENG, ZHANG XINYUE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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