Piezoelectric type electrostatic chuck

The piezoelectric type electrostatic chuck comprises electrodes, a ceramic plate and an aluminum substrate, the ceramic plate is arranged on the aluminum substrate, the electrodes are arranged on the ceramic plate and the aluminum substrate, and a piezoelectric module is jointly arranged between the ceramic plate and the aluminum substrate. The piezoelectric module comprises a central piezoelectric module, a transition piezoelectric module, a peripheral piezoelectric module and an edge piezoelectric module, and the central piezoelectric module, the transition piezoelectric module, the peripheral piezoelectric module and the edge piezoelectric module are all arranged between the ceramic plate and the aluminum substrate. When the piezoelectric type electrostatic chuck is used, the central piezoelectric module, the transition piezoelectric modules, the peripheral piezoelectric modules or the edge piezoelectric modules drive capacitance response in a radio frequency circuit in an electrode to influence plasmas by