Piezoelectric-based microactuator arrangement for mitigating phase variations in planar external forces and flexural vibrations
A method of a piezoelectric (PZT) device, such as a hard disk drive microactuator, includes one or more layers of polarized piezoelectric material with top and bottom surfaces coupled with respective electrode layers coupled with a power source to drive an active PZT layer. The electrode layers have...
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Sprache: | chi ; eng |
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