Piezoelectric-based microactuator arrangement for mitigating phase variations in planar external forces and flexural vibrations

A method of a piezoelectric (PZT) device, such as a hard disk drive microactuator, includes one or more layers of polarized piezoelectric material with top and bottom surfaces coupled with respective electrode layers coupled with a power source to drive an active PZT layer. The electrode layers have...

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Bibliographische Detailangaben
Hauptverfasser: HAGIYA SHINOBU, NITTA HARUKI, TSUCHIDA HIROYASU, PAN ZONGXI, NOGUCHI YOSHINOBU
Format: Patent
Sprache:chi ; eng
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