Piezoelectric-based microactuator arrangement for mitigating phase variations in planar external forces and flexural vibrations

A method of a piezoelectric (PZT) device, such as a hard disk drive microactuator, includes one or more layers of polarized piezoelectric material with top and bottom surfaces coupled with respective electrode layers coupled with a power source to drive an active PZT layer. The electrode layers have different thicknesses, where a particular thickness may be configured to mitigate variations in out-of-plane motion or bending associated with operational variations in a z-height between the corresponding actuator arm and the recording medium, and likewise, to mitigate phase variations in flexural vibrations. 一种压电(PZT)设备诸如硬盘驱动器微致动器的方法包括一层或多层极化压电材料，其中顶表面和底表面与跟功率源耦接以驱动有源PZT层的相应电极层耦接。电极层具有不同的厚度，其中特定厚度可以被配置为减轻与对应致动器臂和记录介质之间的z高度的操作变化相关联的平面外运动或弯曲的变化，并且同样，减轻挠曲振动的相位变化。