Multiband terahertz metamaterial resonator with ultrahigh quality factor

The invention discloses a multi-band terahertz metamaterial resonator with an ultrahigh quality factor, which comprises a plurality of units which are periodically arranged, each unit has the same structure and is composed of a substrate made of quartz, and a structure A, a structure B, a structure C and a structure D which are arranged on the substrate and are made of lithium tantalate films, the problems that in the prior art, metal in a high-quality-factor metal metamaterial resonator is prone to being oxidized, loss is high, and the structure is complex are solved, when a to-be-measured object is deposited on the metamaterial, the dielectric environment around the cross-shaped structure can be changed, and therefore frequency shift happens to a resonance peak; and high-sensitivity sensing of an object to be detected can be realized through the frequency shift of the resonance peak of an extremely high quality factor. 本发明公开了一种具有超高品质因子的多频带太赫兹超材料谐振器，包括由多个单元呈周期性排布构成，每个所述单元结构相同，均由石英组成的衬底和衬底上面四个由钽酸锂薄膜构成的结构A、结构B