Processing liquid supply device and method for removing solids in processing liquid supply device

The invention relates to a processing liquid supply device and a method for removing solids in the processing liquid supply device, and discloses a processing liquid supply device with a flushing function and a method for removing solids such as solid silica in the processing liquid supply device. The flushing function is a function of removing solids such as silica precipitated in accordance with the supply of a processing liquid in a processing liquid supply device that supplies the processing liquid to a substrate processing device and recovers and regenerates the processing liquid. 本发明是处理液供应装置以及处理液供应装置的固体去除方法，公开一种具有冲洗功能的处理液供应装置以及在处理液供应装置中去除固态二氧化硅等固体的方法，其中，所述冲洗功能是指去除在向基板处理装置供应处理液并回收来再生的处理液供应装置中随着供应处理液而析出的二氧化硅等固体的功能。