Charge-to-mass ratio analysis device of asymmetric unilateral electric field charged particle beam

The invention provides a charge-to-mass ratio analysis device for an asymmetric unilateral electric field charged particle beam, and the device comprises a vacuum chamber which is used for receiving a plurality of charged particle beams emitted by an external charged particle streaming generation de...

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Bibliographische Detailangaben
Hauptverfasser: ZHONG LIANGHAO, FU YUNQING, YAO KE, JIANG ZIHUAN, SU PING, HUANG LIANGYU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a charge-to-mass ratio analysis device for an asymmetric unilateral electric field charged particle beam, and the device comprises a vacuum chamber which is used for receiving a plurality of charged particle beams emitted by an external charged particle streaming generation device; the electric field deflection electrode assembly is arranged in the vacuum chamber, is connected with an external voltage-stabilized power supply and is used for providing a deflection electric field of an asymmetric single side; and the magnet assembly is arranged in the vacuum chamber and is used for providing a uniform magnetic field orthogonal to the deflection electric field so as to form an orthogonal electromagnetic field with the deflection electric field, and non-target charged particle beams in the charged particle beams are deflected through the orthogonal electromagnetic field and target charged particle beams corresponding to a preset charge-to-mass ratio pass through the orthogonal electromagnet