Electronic grade boron tribromide purification system and method

The invention relates to the technical field of boron tribromide purification, in particular to an electronic grade boron tribromide purification system and method. The invention discloses an electronic grade boron tribromide purification system. Comprising a raw material tank, a diaphragm feeding p...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HUANG JIADOU, ZONG LIDONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
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