Electronic grade boron tribromide purification system and method

The invention relates to the technical field of boron tribromide purification, in particular to an electronic grade boron tribromide purification system and method. The invention discloses an electronic grade boron tribromide purification system. Comprising a raw material tank, a diaphragm feeding p...

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Hauptverfasser: HUANG JIADOU, ZONG LIDONG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention relates to the technical field of boron tribromide purification, in particular to an electronic grade boron tribromide purification system and method. The invention discloses an electronic grade boron tribromide purification system. Comprising a raw material tank, a diaphragm feeding pump, a first rectifying tower, a first rectifying tower top condenser, a first rectifying tower kettle reboiler, a first diaphragm pump delivery pump, a second rectifying tower, a second rectifying tower top condenser, a second rectifying tower kettle reboiler, an adsorption tower, a cooler, a buffer tank, a second diaphragm pump delivery pump, a third rectifying tower and a third rectifying tower receiving tank, a third rectifying tower kettle reboiler, a third rectifying tower top condenser and a finished product outlet pipeline. According to the present invention, with the rectification, adsorption, filtration and distillation process setting, the industrial-grade boron tribromide raw material can be purified to