Micro-ring resonator with cavity structure

The invention discloses a micro-ring resonator with a cavity structure, and belongs to the field of micro electro mechanical systems. The problem that the quality factor (Q value) of a resonance system is limited to be increased due to thermoelastic damping of an existing micro-ring resonator is solved. The device comprises a circular ring harmonic oscillator, a supporting structure, a driving electrode and an anchor point pile which are located on a base, and the outer surface of the circular ring harmonic oscillator is plated with a metal conductive layer; the inner surface of the circular ring harmonic oscillator is fixedly connected with the anchor point pile through a supporting structure, and the three are coaxial; a cavity is arranged along the circumferential extension direction of the circular ring harmonic oscillator, and the cavity is positioned in the annular body of the circular ring harmonic oscillator; the plurality of driving electrodes are annularly and uniformly distributed on the outer side