Capacitive pressure sensor based on flexible material and manufacturing method thereof

The invention provides a capacitive pressure sensor based on a flexible material and a manufacturing method thereof. The capacitive pressure sensor comprises an inspection layer, an insulating layer and a shielding layer, the inspection layer comprises an upper electrode layer, a lower electrode lay...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LI ZHIJUN, XIA HAISHENG, ZHAO SHUMI, ZHONG CHUANYU, LIU YANG, TANG YAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	DIAGNOSIS HUMAN NECESSITIES HYGIENE IDENTIFICATION LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEDICAL OR VETERINARY SCIENCE PERFORMING OPERATIONS PHYSICS SURGERY TESTING TRANSPORTING
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