Capacitive pressure sensor based on flexible material and manufacturing method thereof

The invention provides a capacitive pressure sensor based on a flexible material and a manufacturing method thereof. The capacitive pressure sensor comprises an inspection layer, an insulating layer and a shielding layer, the inspection layer comprises an upper electrode layer, a lower electrode layer and a dielectric layer; the dielectric layer is clamped between the upper electrode layer and the lower electrode layer to separate the upper electrode layer from the lower electrode layer; the insulating layer is clamped between the shielding layer and the upper electrode layer, and the insulating layer is clamped between the shielding layer and the lower electrode layer; the shielding layer is connected with a ground wire. By introducing the flexible shielding layer, the stability of the sensor is greatly improved, and the flexibility of the sensor is still kept. 本发明提供了一种基于柔性材料的电容式压力传感器及其制作方法，包括检查层、绝缘层、屏蔽层；检查层包括上电极层、下电极层以及介电层；介电层夹设在上电极层和下电极层之间，将上电极层和下电极层隔离开；绝缘层夹设在屏蔽层与上电极层之间，绝缘层夹设在屏蔽层与下电极层之间；屏蔽层连接地线。本发明引入柔性屏蔽层较