Memory device, method of forming same, and memory device including memory cell

In some embodiments, the present disclosure relates to a memory device, a method of forming the same, and a memory device including a memory cell, the memory device includes a semiconductor substrate, a first electrode disposed over the semiconductor substrate, a ferroelectric layer disposed between...

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Bibliographische Detailangaben
Hauptverfasser: LIN ZIYU, KUANG XUNCHONG, LI BISHEN, KIM HAEKWANG, CAI ZHENGYUAN, WEI YIYANG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:In some embodiments, the present disclosure relates to a memory device, a method of forming the same, and a memory device including a memory cell, the memory device includes a semiconductor substrate, a first electrode disposed over the semiconductor substrate, a ferroelectric layer disposed between the first electrode and the semiconductor substrate, and a first stressor layer separating the first electrode from the ferroelectric layer. The first stressor layer has a coefficient of thermal expansion greater than a coefficient of thermal expansion of the ferroelectric layer. 在一些实施例中,本公开涉及一种存储器件、形成其的方法及包括存储单元的存储器件,所述存储器件包括半导体衬底、设置在半导体衬底之上的第一电极、设置在第一电极与半导体衬底之间的铁电层及将第一电极与铁电层隔开的第一应力源层。第一应力源层具有比铁电层的热膨胀系数大的热膨胀系数。