Removal function error correction capability characterization method, system and medium

The invention is suitable for the technical field of optical processing, and provides a function error correction removal capability characterization method, system and medium, and the function error correction removal capability characterization method comprises the following steps: obtaining surface shape error volume variation and processing time; the surface shape error volume variation is a volume difference value of surface shape errors before and after processing under a preset spatial frequency; an effective removal rate spectrum of the removal function is calculated from the surface shape error volume variation and the processing time. According to the removal function error correction capability characterization method and system for sub-aperture polishing and the medium, quantitative characterization of the removal function space frequency error correction capability can be achieved, and a foundation is laid for follow-up rapid and automatic matching of optimal process parameters according to error