MOCVD (Metal Organic Chemical Vapor Deposition) equipment for ZnO film growth
The invention discloses MOCVD (Metal Organic Chemical Vapor Deposition) equipment for ZnO film growth, which comprises a reaction chamber, a gas transportation system, a control system, a reaction processing system and a vibration reduction balance system, the reaction processing system comprises a...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses MOCVD (Metal Organic Chemical Vapor Deposition) equipment for ZnO film growth, which comprises a reaction chamber, a gas transportation system, a control system, a reaction processing system and a vibration reduction balance system, the reaction processing system comprises a spray gun device, a rotating assembly, a placing platform and a lifting mechanism, and the reaction chamber is provided with a temperature color-changing adhesive tape. The vibration reduction balance system comprises a vibration reduction assembly and a balance assembly. According to the invention, the temperature color-changing adhesive tape is arranged for directly feeding back the temperature change to an operator, so that the temperature condition of the MOCVD equipment can be conveniently and quickly known, and the temperature can be timely adjusted; the lifting mechanism is arranged to quickly adjust the height of the platform I, so that the MOCVD equipment can be used for placing and processing substrate ma |
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